Beam Injection Assessment of Microstructures in Semiconductors

Beam Injection Assessment of Microstructures in Semiconductors

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The characterisation of semiconductors is of key importance in preparing and applying semiconductors in industry. The present work deals with theoretical and experimental topics which are related to the assessment of microstructures in semiconductors by means of beam injection and related methods.BIAMS 2000 : Proceedings of the 6th International Workshop on Beam Injection Assessment of Microstructures in ... is provided by a constant flow liquid nitrogen (LN2) feedthrough system which employs an LN2 dewar with a heater and an air pump. ... This can pose a problem since ion beam induced damage severely alters the charge collection characteristics being ... Both the CSA803 and SCD50O0 arc also slow to refresh and typically acquire at 1Hz. However, the 694C is a oneanbsp;...


Title:Beam Injection Assessment of Microstructures in Semiconductors
Author: Hajime Tomokage, Takashi Sekiguchi
Publisher: - 2001-01-01
ISBN-13:

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